Two issues made this an  interesting design.  There was a trade-off between one large turbopump which simplified the system but was difficult to procure; and the more complex design that featured two smaller turbopumps which were readily available.   The second challenge was to obtain conductivity equivalent to a single, large turbopump from the two smaller units and still fit within the footprint of the SEMI standard for radial cluster tools.

This design aims for the low end of the market while still retaining the features, albeit scaled down, of the higher end probers.  The system is composed of a four axis (XYZ and Q) positioner mounted under a ring carrier plate.  The ring carrier plate accepted tooling  to utilize Teradyne, LTX and other popular test heads.  A CCD camera working along a folded optical path was built into the plate as well as the swing-away microscope mount shown.  Detent mechanisms are built into the attachment mechanisms for the plate at the leveling screws/posts as well as at the ring carrier to ease setup.

This is typical of sever pedestal designed to meet the specifications of different processes.   Designs range from 125 mm to 200 mm wafer sizes and optionally feature heaters, gas feeds and clamping.

While the designs on this page represent functioning products, several details in each case have been deleted or altered to protect the client.