Semiconductor Capital Equipment
||High Conductivity Chamber
Two issues made this an interesting design. There was a trade-off
between one large turbopump which simplified the system but was difficult to procure; and
the more complex design that featured two smaller turbopumps which were readily available.
The second challenge was to obtain conductivity equivalent to a single, large
turbopump from the two smaller units and still fit within the footprint of the SEMI
standard for radial cluster tools.
This design aims for the low end of the market while still retaining the
features, albeit scaled down, of the higher end probers. The system is composed of a
four axis (XYZ and Q) positioner mounted under a ring carrier plate. The ring
carrier plate accepted tooling to utilize Teradyne, LTX and other popular test
heads. A CCD camera working along a folded optical path was built into the plate as
well as the swing-away microscope mount shown. Detent mechanisms are built into the
attachment mechanisms for the plate at the leveling screws/posts as well as at the ring
carrier to ease setup.
This is typical of sever pedestal designed to meet the specifications of
different processes. Designs range from 125 mm to 200 mm wafer sizes and
optionally feature heaters, gas feeds and clamping.
While the designs on
this page represent functioning products, several details in each case have been deleted
or altered to protect the client.